Growth of ZnO thin films on GaAs by pulsed laser deposition
- 1 April 1995
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 259 (1), 1-4
- https://doi.org/10.1016/0040-6090(94)09479-9
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Surface acoustic wave properties of ZnO films on {001}-cut 〈110〉-propagating GaAs substratesJournal of Applied Physics, 1994
- Magnetic and structural properties of Pt/Co and Pd/Co multilayers sputtered on single-crystal ZnOThin Solid Films, 1994
- Aluminium content dependence of milky transparent conducting ZnO:Al films with textured surface prepared by d.c. magnetron sputteringThin Solid Films, 1994
- Enhanced conductivity of zinc oxide thin films by ion implantation of hydrogen atomsApplied Physics Letters, 1994
- Transparent and Conductive ZnO Thin Films Prepared by Atmospheric-Pressure Chemical Vapor Deposition Using Zinc AcetylacetonateJapanese Journal of Applied Physics, 1994
- Thin-film induced stress in GaAs ridge-waveguide structures integrated with sputter-deposited ZnO filmsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Growth of ZnO films on GaAs substrates with a SiO2 buffer layer by RF planar magnetron sputtering for surface acoustic wave applicationsJournal of Crystal Growth, 1994
- Force sensing microcantilever using sputtered zinc oxide thin filmApplied Physics Letters, 1994
- Effects of annealing ZnO films prepared by ion-beam-assisted reactive depositionThin Solid Films, 1994
- Thermally stable ZnO films deposited on GaAs substrates with a SiO2 thin buffer layerApplied Physics Letters, 1992