Radiation chemistry of poly(lactides) as new polymer resists for the LIGA process
- 1 June 1994
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 4 (2), 84-93
- https://doi.org/10.1088/0960-1317/4/2/006
Abstract
No abstract availableKeywords
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