Atomic diffusion bonding of wafers with thin nanocrystalline metal films
- 28 June 2010
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B
- Vol. 28 (4), 706-714
- https://doi.org/10.1116/1.3437515
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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