Amorphous silicon solar cells have been fabricated in several different structures: heterojunctions, p-i-n junctions, and Schottky barrier devices. The procedures used in constructing the various solar cells are discussed, and their photovoltaic properties are compared. At present, the highest conversion efficiency (5.5 percent) has been obtained with a Schottky barrier cell, and this structure appears to offer the best promise of approaching the estimated efficiency limit of ∼ 15 percent.