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Preparation of cubic boron nitride films by radio frequency bias sputtering
Home
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Preparation of cubic boron nitride films by radio frequency bias sputtering
Preparation of cubic boron nitride films by radio frequency bias sputtering
OT
Osamu Tsuda
Osamu Tsuda
YY
Yukiko Yamada
Yukiko Yamada
TF
Tsuyoshi Fujii
Tsuyoshi Fujii
TY
Toyonobu Yoshida
Toyonobu Yoshida
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1 November 1995
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 13
(6)
,
2843-2847
https://doi.org/10.1116/1.579715
Abstract
No abstract available
Cited by 63 articles