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Refractory silicides for integrated circuits
Home
Publications
Refractory silicides for integrated circuits
Refractory silicides for integrated circuits
SM
S. P. Murarka
S. P. Murarka
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1 July 1980
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 17
(4)
,
775-792
https://doi.org/10.1116/1.570560
Abstract
No abstract available
Keywords
INTEGRATED CIRCUITS
SIC
METAL SILICIDES
STRESS
STRUCTURE
RESISTIVITY
DEVICE
Cited by 560 articles