Hybrid-assembled micro dosing system using silicon-based micropump/ valve and mass flow sensor
- 1 June 1998
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 69 (1), 85-91
- https://doi.org/10.1016/s0924-4247(98)00039-9
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
- A novel micropump design with thick-film piezoelectric actuationMeasurement Science and Technology, 1997
- Low-cost silicon sensors for mass flow measurement of liquids and gasesSensors and Actuators A: Physical, 1995
- A valve-less planar fluid pump with two pump chambersSensors and Actuators A: Physical, 1995
- Microflow devices and systemsJournal of Micromechanics and Microengineering, 1994
- Towards integrated microliquid handling systemsJournal of Micromechanics and Microengineering, 1994
- LIGA micropump for gases and liquidsSensors and Actuators A: Physical, 1994
- Microfluidics-a reviewJournal of Micromechanics and Microengineering, 1993
- A valveless diffuser/nozzle-based fluid pumpSensors and Actuators A: Physical, 1993
- Piezoelectric micropump with three valves working peristalticallySensors and Actuators A: Physical, 1990
- A thermopneumatic micropump based on micro-engineering techniquesSensors and Actuators A: Physical, 1990