Characterization of undoped and Cu-doped ZnO films for surface acoustic wave applications
- 1 November 2001
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 398-399, 641-646
- https://doi.org/10.1016/s0040-6090(01)01332-3
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
- MPACVD diamond films for surface acoustic wave filtersDiamond and Related Materials, 2001
- Photoresponse on Surface Acoustic Wave Devices with Compound Semiconductor and LiNbO3 StructuresJapanese Journal of Applied Physics, 2000
- Acoustic wave propagation in free standing CVD diamond: Influence of film quality and temperatureDiamond and Related Materials, 1999
- Growth of ZnO thin films on interdigital transducer/Corning 7059 glass substrates by two-step fabrication methods for surface acoustic wave applicationsJournal of Physics D: Applied Physics, 1998
- GHz-Band Surface Acoustic Wave Devices Using the Second Leaky Mode on LiTaO3 and LiNbO3Japanese Journal of Applied Physics, 1997
- Characteristics of ZnO thin films deposited onto Al/Si substrates by r.f. magnetron sputteringThin Solid Films, 1997
- Highly resistive sputtered ZnO films implanted with copperJournal of Materials Research, 1996
- Influence of Copper Dopants on the Resistivity of ZnOFilmsSurface and Interface Analysis, 1996
- Quasi-Microwave Band Longitudinally Coupled Surface Acoustic Wave Resonator Filters Using ZnO/Sapphire SubstrateJapanese Journal of Applied Physics, 1995
- A new approach for modeling of current degradation in hot-electron damaged LDD NMOSFETsIEEE Transactions on Electron Devices, 1995