Heating effects in ionization-assisted processes
- 1 July 1984
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 117 (4), 261-267
- https://doi.org/10.1016/0040-6090(84)90356-0
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Tribological and microstructural characteristics of ion-nitrided steelsThin Solid Films, 1983
- A predictive model for specimen heating during ion platingVacuum, 1982