Application of oxygen plasma processing to silicon direct bonding
- 31 May 1993
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 36 (3), 227-231
- https://doi.org/10.1016/0924-4247(93)80197-o
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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