Crystallographic and morphological characterization of reactively sputtered Ta, TaN and TaNO thin films
- 1 October 1997
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 307 (1-2), 79-88
- https://doi.org/10.1016/s0040-6090(97)00319-2
Abstract
No abstract availableKeywords
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