Lab-on-CMOS integration of microfluidics and electrochemical sensors
- 15 July 2013
- journal article
- research article
- Published by Royal Society of Chemistry (RSC) in Lab on a Chip
- Vol. 13 (19), 3929-3934
- https://doi.org/10.1039/c3lc50437a
Abstract
This paper introduces a CMOS–microfluidics integration scheme for electrochemical microsystems. A CMOS chip was embedded into a micro-machined silicon carrier. By leveling the CMOS chip and carrier surface to within 100 nm, an expanded obstacle-free surface suitable for photolithography was achieved. Thin film metal planar interconnects were microfabricated to bridge CMOS pads to the perimeter of the carrier, leaving a flat and smooth surface for integrating microfluidic structures. A model device containing SU-8 microfluidic mixers and detection channels crossing over microelectrodes on a CMOS integrated circuit was constructed using the chip-carrier assembly scheme. Functional integrity of microfluidic structures and on-CMOS electrodes was verified by a simultaneous sample dilution and electrochemical detection experiment within multi-channel microfluidics. This lab-on-CMOS integration process is capable of high packing density, is suitable for wafer-level batch production, and opens new opportunities to combine the performance benefits of on-CMOS sensors with lab-on-chip platforms.Keywords
This publication has 15 references indexed in Scilit:
- Seamless integration of CMOS and microfluidics using flip chip bondingJournal of Micromechanics and Microengineering, 2013
- A CMOS Electrochemical Impedance Spectroscopy (EIS) Biosensor ArrayIEEE Transactions on Biomedical Circuits and Systems, 2010
- A direct-write microfluidic fabrication process for CMOS-based Lab-on-Chip applicationsMicroelectronic Engineering, 2009
- CMOS Microelectrode Array for Electrochemical Lab-on-a-Chip ApplicationsIEEE Sensors Journal, 2009
- Microparticle photometry in a CMOS microsystem combining magnetic actuation and in situ optical detectionSensors and Actuators B: Chemical, 2008
- A 0.18-μm CMOS capacitive sensor Lab-on-ChipSensors and Actuators A: Physical, 2008
- Chemical Sensors with Integrated ElectronicsChemical Reviews, 2008
- Integrated cell manipulation system—CMOS/microfluidic hybridLab on a Chip, 2007
- IC/Microfluidic Hybrid System for Magnetic Manipulation of Biological CellsIEEE Journal of Solid-State Circuits, 2006
- A cmos chip for individual cell manipulation and detectionIEEE Journal of Solid-State Circuits, 2003