Atomic layer deposited titanium dioxide and its application in resonant waveguide grating
- 30 July 2010
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 49 (22), 4321-4325
- https://doi.org/10.1364/ao.49.004321
Abstract
We demonstrate good optical quality thin films grown by atomic layer deposition at . The optical properties were studied using spectroscopic ellipsometry and prism coupling methods. The refractive index was 2.27, and the slab waveguide propagation loss was less than at . A high quality resonant waveguide grating was fabricated using a thin layer on top of a grating.
Keywords
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