ISS/SIMS characterization of UV/O3 cleaned surfaces
- 30 September 1980
- journal article
- Published by Elsevier BV in Applications of Surface Science
- Vol. 6 (1), 39-46
- https://doi.org/10.1016/0378-5963(80)90053-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- UV/Ozone Cleaning of SurfacesIEEE Transactions on Parts, Hybrids, and Packaging, 1976
- Developments in secondary ion mass spectroscopy and applications to surface studiesSurface Science, 1975
- Surface cleaning by ultraviolet radiationJournal of Vacuum Science and Technology, 1974