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Influence of 4H-SiC Growth Conditions on Micropipe Dissociation
Home
Publications
Influence of 4H-SiC Growth Conditions on Micropipe Dissociation
Influence of 4H-SiC Growth Conditions on Micropipe Dissociation
IK
Isaho Kamata
Isaho Kamata
Hidekazu Tsuchida
Hidekazu Tsuchida
TJ
Tamotsu Jikimoto
Tamotsu Jikimoto
KI
Kunikazu Izumi
Kunikazu Izumi
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15 October 2002
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 41
(Part 2, No)
,
L1137-L1139
https://doi.org/10.1143/jjap.41.l1137
Abstract
No abstract available
Keywords
SIC GROWTH
MICROPIPE DISSOCIATION
4H SIC
GROWTH CONDITIONS
INFLUENCE OF 4H
Cited by 31 articles