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A Simple Technique for Silicon Nitride Growth
Home
Publications
A Simple Technique for Silicon Nitride Growth
A Simple Technique for Silicon Nitride Growth
DH
David Hackleman
David Hackleman
YV
Yu. G. Vlasov
Yu. G. Vlasov
RB
Richard P. Buck
Richard P. Buck
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1 November 1978
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 125
(11)
,
1875-1876
https://doi.org/10.1149/1.2131314
Abstract
No abstract available
Cited by 5 articles