Patterning of 25-nm-wide silicon webs with an aspect ratio of 13
- 30 June 2003
- journal article
- Published by Elsevier BV in Microelectronic Engineering
- Vol. 67-68, 376-380
- https://doi.org/10.1016/s0167-9317(03)00187-4
Abstract
No abstract availableKeywords
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