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Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
Home
Publications
Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
Recent Achievements and Future Challenges in SiC Homoepitaxial Growth
TK
Tsunenobu Kimoto
Tsunenobu Kimoto
SN
S. Nakazawa
S. Nakazawa
KF
Keiko Fujihira
Keiko Fujihira
TH
T. Hirao
T. Hirao
SN
Shun-Ichi Nakamura
Shun-Ichi Nakamura
YC
Yi Chen
Yi Chen
KH
K. Hashimoto
K. Hashimoto
HM
Hiroyuki Matsunami
Hiroyuki Matsunami
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1 April 2002
journal article
Published by
Trans Tech Publications, Ltd.
in
Materials Science Forum
Vol. 389-393
,
165-170
https://doi.org/10.4028/www.scientific.net/msf.389-393.165
Abstract
No abstract available
Keywords
(03-38) PLANE
(11-20) PLANE
DEEP LEVEL
HOMOEPITAXIAL GROWTH
HOT-WALL CVD
IMPURITY DOPING
Cited by 19 articles