An electron spin resonance study of reactively evaporated silicon oxide
- 1 October 1971
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 8 (4), 237-243
- https://doi.org/10.1016/0040-6090(71)90016-2
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Charge storage in evaporated silicon oxide filmsThin Solid Films, 1970
- The conduction process in silicon oxideThin Solid Films, 1970
- Electrical conduction in silicon monoxide filmsThin Solid Films, 1970
- Electron Spin Resonance in Amorphous Silicon, Germanium, and Silicon CarbidePhysical Review Letters, 1969
- Electrical conduction in evaporated silicon oxide filmsThin Solid Films, 1969
- Dielectric Properties of Reactively Evaporated Silicon MonoxideJournal of Vacuum Science and Technology, 1969
- Annealing behaviour in vacuum-deposited films of silicon oxideThin Solid Films, 1968
- Dielectric properties of thin films of aluminium oxide and silicon oxideThin Solid Films, 1968
- Deposition of Oxide Films by Reactive EvaporationJournal of Vacuum Science and Technology, 1966