Room temperature synthesis of cubic boron nitride films by pulse high energy density plasma
- 1 March 1995
- journal article
- Published by Elsevier BV in Journal of Crystal Growth
- Vol. 148 (3), 232-235
- https://doi.org/10.1016/0022-0248(94)00877-9
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Charge Instability in MIS Structures on Silicon with PECVD Boron Nitride Thin Filmsphysica status solidi (a), 1992
- Tribological study of cubic boron nitride filmThin Solid Films, 1992
- Function of Substrate Bias Potential for Formation of Cubic Boron Nitride Films in Plasma CVD TechniqueJapanese Journal of Applied Physics, 1987
- Formation of Cubic Boron Nitride Films by Boron Evaporation and Nitrogen Ion Beam BombardmentJapanese Journal of Applied Physics, 1983
- Chemical vapour deposition of thin films of BN onto fused silica and sapphireThin Solid Films, 1981
- The Chemical Deposition of Boron‐Nitrogen FilmsJournal of the Electrochemical Society, 1980
- Chemical vapor deposition of hexagonal boron nitride thick film on ironJournal of Crystal Growth, 1979