THE MAGNETRON GAUGE: A COLD-CATHODE VACUUM GAUGE

Abstract

A cold-cathode ionization gauge with axial magnetic field is described which is capable of measuring pressure in the range 10⁻³to 10⁻¹² mm Hg and is primarily useful in the range above 5 × 10⁻¹⁰ mm Hg. The gauge is operated with an anode voltage of 6 kilovolts and a magnetic field of 1000 gauss. The relationship between ion current and pressure is linear in the pressure range 10⁻⁴ to 5 × 10⁻¹⁰ mm Hg; at lower pressures the relationship i₊ = cP^1.7 obtains. In the linear region the ion current per unit pressure is given by i₊ (amperes) (mm Hg) for nitrogen (i.e., a sensitivity about 45 times greater than obtainable with a thermionic triode gauge).