Control of hydrogen content of boron thin films produced in a dc toroidal discharge

Abstract

Hydrogenated amorphous boron films have been produced by a toroidal glow discharge of B2H6/He mixtures at low pressures (10−2 Torr). Chemically stable pure films with a low hydrogen content can be formed at a moderate substrate temperature (∼200 °C) when the diborane flow rate is raised above 10 sccm with the discharge power lowered below 100 W. The controllability of H content is potentially interesting for applications in the coating of nuclear fusion devices, as well as for use in electronic devices.