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The Anodic Oxidation of p‐Benzoquinone and Maleic Acid
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The Anodic Oxidation of p‐Benzoquinone and Maleic Acid
The Anodic Oxidation of p‐Benzoquinone and Maleic Acid
CB
C. Bock
C. Bock
BM
B. MacDougall
B. MacDougall
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1 August 1999
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 146
(8)
,
2925-2932
https://doi.org/10.1149/1.1392030
Abstract
The beneficial effects of citric acid in inhibiting alumina particle deposition onto silica areas during tungsten chemical mechanical planarization were investigated. The electrokinetics of alumina in the presence of citric acid and the uptake of citric acid by alumina were studied experimentally. At a pH of 4, as the citric acid concentration was increased, the zeta potential of alumina became less positive and reversed sign. Slurry dip tests and small‐scale polishing experiments were carried out and the surface cleanliness of contaminated oxide surfaces was characterized with a field emission scanning electron microscope and image analysis. It has been demonstrated that citric acid is very effective in controlling alumina contamination on oxide surfaces when added into the slurry. Electrochemical tests showed that citric acid does not significantly attack tungsten films. A mechanism for the interaction between citric acid and alumina particles has been proposed. © 1999 The Electrochemical Society. All rights reserved.
Keywords
TUNGSTEN
SLURRY
OXIDE SURFACES
CONTAMINATED
CITRIC ACID AND ALUMINA
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Cited by 56 articles