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Electropolishing Silicon in Hydrofluoric Acid Solutions
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Electropolishing Silicon in Hydrofluoric Acid Solutions
Electropolishing Silicon in Hydrofluoric Acid Solutions
DT
Dennis R. Turner
Dennis R. Turner
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1 January 1958
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 105
(7)
,
402
https://doi.org/10.1149/1.2428873
Abstract
No abstract available
Keywords
ELECTROPOLISHING SILICON
SILICON IN HYDROFLUORIC
HYDROFLUORIC ACID SOLUTIONS
Cited by 547 articles