Calibration of Multi-Axis MEMS Force Sensors Using the Shape-From-Motion Method
- 5 February 2007
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Sensors Journal
- Vol. 7 (3), 344-351
- https://doi.org/10.1109/jsen.2006.890141
Abstract
Precise calibration of multi-axis microelectromechanical systems (MEMS) force sensors is difficult for several reasons, including the need to apply many known force vectors at precise orientations at the micro- and nanoNewton (nN) force scales, and the risk of damaging the small, fragile microdevices. To tackle these challenges, this paper introduces the shape-from-motion calibration method. A new design of a two-axis MEMS capacitive force sensor with high linearity and nN resolutions is presented. Structural-electrostatic coupled-field simulations are conducted in order to optimize the sensor design. The designed sensor is calibrated with the shape-from-motion method, the least-squares method as well as the gravity-based method for comparison purposes. Calibration results demonstrate that the shape-from-motion method provides a rapid, practical, and accurate technique for calibrating multi-axis MEMS sensorsKeywords
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