Effect of microstructural change on magnetic property of Mn-implanted p-type GaN

Abstract
A dilute magnetic semiconductor was achieved by implanting Mn ions into p -type GaN and subsequent annealing. The ferromagneticproperty was obtained after annealing at 800 ° C . This was attributed to the formation of Ga–Mn magnetic phases. Higher temperature annealing at 900 ° C reduced the ferromagnetic signal and produced antiferromagnetic Mn–N compounds such as Mn 6 N 2.58 and Mn 3 N 2 , leaving N vacancies. This provides evidence that N vacancies play a critical role in weakening the ferromagneticproperty in the Mn-implanted GaN.