Fatigue behavior of thin Au and Al films on polycarbonate and polymethylmethacrylate for micro-optical components
- 1 February 2009
- journal article
- research article
- Published by Elsevier BV in Thin Solid Films
- Vol. 517 (8), 2702-2707
- https://doi.org/10.1016/j.tsf.2008.12.018
Abstract
No abstract availableKeywords
This publication has 18 references indexed in Scilit:
- Shape deviations in masks for optical structures produced by electron beam lithographyMicrosystem Technologies, 2004
- Thermal effects in PZT: diffusion of titanium and recrystallization of platinumMaterials Science and Engineering: A, 2004
- Channel cracking of β-NiAl thin films on Si substratesActa Materialia, 2004
- Impact of thermal cycling on the evolution of grain, precipitate and dislocation structure in Al, 0.5% Cu, 1% Si thin filmsMicroelectronic Engineering, 2003
- Fatigue in thin films: lifetime and damage formationMaterials Science and Engineering: A, 2001
- Constrained diffusional creep in UHV-produced copper thin filmsActa Materialia, 2001
- Microstructure of thermal hillocks on blanket Al thin filmsThin Solid Films, 2000
- Plasma and ion beam assisted metallization of polymers and their applicationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2000
- Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymerNature, 1998
- Mechanical properties of thin filmsMetallurgical Transactions A, 1989