Amplification of 193 nm radiation in argon-fluoride and generation of tunable VUV radiation by high-order anti-Stokes Raman scattering
- 1 November 1984
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Journal of Quantum Electronics
- Vol. 20 (11), 1284-1287
- https://doi.org/10.1109/jqe.1984.1072308
Abstract
Tuned narrow-bandwidth UV radiation at 193 nm is generated by SRS of dye laser radiation and is amplified in ArF sections. In a subsequent second hydrogen Raman cell anti-Stokes radiation up to the sixth order (around 130 nm) is generated. Power measurements and calibration are described.Keywords
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