Microwave Discharge Cavities Operating at 2450 MHz

Abstract

Five simple microwave cavities for producing discharges in gases were tested in He and H₂ at pressures from 1 μ to 1 atm. Three of the cavities are commonly used, and two have been recently designed. One of the newly designed cavities offered a considerable improvement over early models with respect to compactness, ease of attachment to the system, and efficiency.