Electrical characteristics and growth kinetics in discharges used for plasma deposition of amorphous carbon
- 1 November 1986
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 144 (2), 265-280
- https://doi.org/10.1016/0040-6090(86)90419-0
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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