High efficiency fine boring of monocrystalline silicon ingot by electrical discharge machining
- 1 April 1999
- journal article
- Published by Elsevier BV in Precision Engineering
- Vol. 23 (2), 126-133
- https://doi.org/10.1016/s0141-6359(98)00029-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Microstructuring of silicon by electro-discharge machining (EDM) — part I: theorySensors and Actuators A: Physical, 1997
- Micro EDM.Journal of the Japan Society for Precision Engineering, 1991