X-ray diffraction determination of texture and internal stresses in magnetron PVD molybdenum thin films
- 31 December 1991
- journal article
- Published by Elsevier BV in Surface and Coatings Technology
- Vol. 50 (1), 5-10
- https://doi.org/10.1016/0257-8972(91)90185-y
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Physical vapor-deposited TiN on cemented carbide: Tempering effectsSurface and Coatings Technology, 1988
- X-ray macrostress determination on textured material; use of the ODF for calculating the X-ray compliancesMetallurgical Transactions A, 1987
- Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron sourceJournal of Vacuum Science and Technology, 1982
- Compressive stress and inert gas in Mo films sputtered from a cylindrical-post magnetron with Ne, Ar, Kr, and XeJournal of Vacuum Science and Technology, 1980