Thermal properties of thin Al2O3 films and their barrier layer effect on thermo-optic properties of TiO2 films grown by atomic layer deposition
- 21 June 2013
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 542, 257-262
- https://doi.org/10.1016/j.tsf.2013.06.030
Abstract
No abstract availableKeywords
Funding Information
- Tekes
- Academy of Finland
- Itä-Suomen Yliopisto
- Higher Education Commission, Pakistan
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