Hydrogenation-produced In2O3/InN core-shell nanorod and its effect on NO2 gas sensing behavior

Abstract

In this work, for the first time, we have made InN/In2O3 core-shell heterostructure by hydrogen plasma treatment. InN nanorods (NRs) were grown by using plasma-assisted molecular beam epitaxy, and hydrogen plasma treatment was performed by using reactive ion etching at room temperature. From x-ray photoemission spectroscopy studies, it was observed that the bonding partner of In changes from N to O and N 1s completely disappeared in the hydrogenated InN NRs. Furthermore, high-resolution transmission electron microscopy revealed the formation of InN/In2O3 core-shell NRs by hydrogenation plasma treatment. The resistance of pristine InN NRs was decreased in NO2 ambient. Interestingly, the resistance of the InN/In2O3 core-shell was increased while introducing NO2 gas. InN NR surface exhibits downward band bending due to the electron accumulation, in NO2 ambient, and the surface band bending was decreased due to the increase in the bulk conduction channel. This reversed gas sensing behavior in InN/In2O3 core-shell NRs was attributed to the increase in depletion layer while reducing the conduction channel width by the absorption of NO2. The InN/In2O3 coreshell NRs exhibited a response of 22.43% at 50 degrees C, which was 5.11 times higher than that of pristine InN NRs.