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Effect of Low Temperature Annealing on the Surface Conductivity of Si in the Si-SiO2-Al System
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Publications
Effect of Low Temperature Annealing on the Surface Conductivity of Si in the Si-SiO2-Al System
Effect of Low Temperature Annealing on the Surface Conductivity of Si in the Si-SiO2-Al System
GC
G. Cheroff
G. Cheroff
FF
F. Fang
F. Fang
FH
F. Hochberg
F. Hochberg
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1 September 1964
journal article
Published by
IBM
in
IBM Journal of Research and Development
Vol. 8
(4)
,
416-421
https://doi.org/10.1147/rd.84.0416
Abstract
No abstract available
Keywords
AL SYSTEM
LOW TEMPERATURE ANNEALING
SI SIO2
SIO2 AL
Cited by 15 articles