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Solubility of Implanted Dopants in Polysilicon: Phosphorus and Arsenic
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Solubility of Implanted Dopants in Polysilicon: Phosphorus and Arsenic
Solubility of Implanted Dopants in Polysilicon: Phosphorus and Arsenic
NL
N. Lifshitz
N. Lifshitz
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1 December 1983
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 130
(12)
,
2464-2467
https://doi.org/10.1149/1.2119614
Abstract
No abstract available
Cited by 12 articles