Some properties of hydrogenated amorphous silicon produced by direct reaction of silicon and hydrogen atoms

Abstract

Measurements of electrical resistivity, optical absorption, photoconductivity, photoluminescence and hydrogen evolution indicate that a method of preparing hydrogenated amorphous silicon by a direct reaction of silicon vapour and atomic hydrogen produces material with good mechanical and electronic properties. The method also allows one to study the kinetics of synthesis and to test the effect of hydrogen incorporation on the disorder of the system.