Simultaneous boron and hydrogen profiling in gas-phase-doped hydrogenated amorphous silicon
- 1 December 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 110 (3), 251-261
- https://doi.org/10.1016/0040-6090(83)90243-2
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit: