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A Simplification of Kämper's Striation Etch for Silicon
Home
Publications
A Simplification of Kämper's Striation Etch for Silicon
A Simplification of Kämper's Striation Etch for Silicon
KM
K. R. Mayer
K. R. Mayer
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1 January 1973
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 120
(12)
,
1780-1782
https://doi.org/10.1149/1.2403364
Abstract
No abstract available
Keywords
STRIATION ETCH
ETCH FOR SILICON
SIMPLIFICATION OF KA
MPER'S STRIATION
Cited by 15 articles