Cooperative development of a piezoresistive pressure sensor with integrated signal conditioning for automotive and industrial applications
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3), 79-83
- https://doi.org/10.1016/0924-4247(90)85016-w
Abstract
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This publication has 1 reference indexed in Scilit:
- Study of electrochemical etch-stop for high-precision thickness control of silicon membranesIEEE Transactions on Electron Devices, 1989