Anomalies of the Energy of Positive Ions Extracted from High-Frequency Ion Sources. A Theoretical Study
- 1 November 1968
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 39 (12), 5723-5726
- https://doi.org/10.1063/1.1656039
Abstract
Starting from the hypothesis of the modulation of energy of ions extracted by the high‐frequency voltage one calculates the width and the form of the energy spectrum of these ions. The variation of the energy deviation of the ions in function of the extraction voltage is obtained by applying to the extraction system the double floating probe theory. These results are in agreement with the experimental results.Keywords
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