Disintegration of Sputtered Deposits

Abstract

When an edge or slit is interposed between a cathode and a receiver the sputtered deposit shows an anomalous distribution. The pattern obtained is shown to be due to disintegration of the deposit by neutralized positive ions of the sputtering gas reflected from the cathode. It is concluded that the sputtered particles have either a low velocity or consist of atomic clusters. It is also shown that electrons having an energy corresponding to more than 2000 volts cause a disintegration similar to that caused by positive ions.