Selective Etching of Gallium Arsenide Crystals in H[sub 2]SO[sub 4]-H[sub 2]O[sub 2]-H[sub 2]O System
- 1 January 1971
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 118 (5), 768
- https://doi.org/10.1149/1.2408161