A number of materials with a perovskite‐like structure such as titanates, stannates, niobates, and cerates have been vapor deposited by a grain‐by‐ grain evaporation technique. Also tungsten trioxide has been evaporated, being directly sublimed from a hot source. Analysis by electron diffraction showed that deposition onto heated (100) or Au (100) surfaces can yield single crystal films of these materials. Corresponding planes and azimuthal directions of the cubic substrate and vapor deposited substance were found to be equal except for where a (110) plane was parallel to the (100). The (100) planes of yielded films with two azimuthal orientations. Other single crystal substrates such as Ge, Si, , , , , and mica rendered the films polycrystalline, partly with preferred orientations. With the exception of the structure of the epitaxed films was identical with that of the bulk material.