Towards 0.1 nm resolution with the first spherically corrected transmission electron microscope

Abstract

A hexapole corrector which compensates for the spherical aberration of the objective lens has been incorporated in a commercial 200 kV transmission electron microscope (TEM) equipped with a field emission gun. The successful correction of the spherical aberration is demonstrated by decreasing the instrumental resolution limit from 0.24 nm down to about 0.13 nm. Images of Si-SiCO₂ interfaces obtained with the corrected TEM show a remarkable suppression of artefacts and a strong increase in contrast apart from the improved resolution. The design, alignment and the performance of the corrected instrument are outlined in detail.