The role of ion/surface interactions and photo-induced reactions during film growth from the vapor phase
- 1 June 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 27 (1), 226-242
- https://doi.org/10.1016/0168-583x(87)90024-3
Abstract
No abstract availableThis publication has 86 references indexed in Scilit:
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