Accelerated testing of anodically bonded glass-silicon packages in salt water
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 283-286
- https://doi.org/10.1109/sensor.1997.613639
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- A single-channel implantable microstimulator for functional neuromuscular stimulationIEEE Transactions on Biomedical Engineering, 1997
- A hermetic glass-silicon micropackage with high-density on-chip feedthroughs for sensors and actuatorsJournal of Microelectromechanical Systems, 1996