Synthesis of fine AlN powder by vapour-phase reaction
- 1 January 1988
- journal article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 7 (1), 66-68
- https://doi.org/10.1007/bf01729918
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Rapid Growth of AlN Films by Particle-Precipitation Aided Chemical Vapor DepositionJapanese Journal of Applied Physics, 1985
- Growth Characteristics of AlN Films Pyrolytically Deposited on SiJournal of Applied Physics, 1968