Viscous damping model for laterally oscillating microstructures
- 1 June 1994
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 3 (2), 81-87
- https://doi.org/10.1109/84.294325
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Advances in processing techniques for silicon micromechanical devices with smooth surfacesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Resonant-structure micromotorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Laterally driven polysilicon resonant microstructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Electrostatic-comb drive of lateral polysilicon resonatorsSensors and Actuators A: Physical, 1990
- Surface micromachining for microsensors and microactuatorsJournal of Vacuum Science & Technology B, 1988
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985
- Miniaturization of Tuning ForksScience, 1968