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Low Dielectric Constant Fluorinated Polyimides for Interlayer Dielectric Applications
Home
Publications
Low Dielectric Constant Fluorinated Polyimides for Interlayer Dielectric Applications
Low Dielectric Constant Fluorinated Polyimides for Interlayer Dielectric Applications
JP
John Pellerin
John Pellerin
RF
Robert Fox
Robert Fox
HH
Huei-Min Ho
Huei-Min Ho
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1 January 1997
journal article
Published by
Springer Nature
in
MRS Proceedings
Vol. 476
https://doi.org/10.1557/proc-476-113
Abstract
No abstract available
Keywords
FLUORINATED POLYIMIDES
EVOLUTION
STRUCTURES
STRESS
INTERLAYER
CAPACITANCE
DIELECTRIC CONSTANT
Cited by 8 articles